SiC Laser slicing

Wafer Slicing Equipment

Wafer Slicing Equipment
Features
Laser Source Options – ns / ps / fs pulse laser (optional)
High-Precision Platform – Advanced X-Y moving stage, micron-level positioning accuracy – Stable, rigid structure for vibration-free operation
High-Efficiency Modifying Module – Optimized for sapphire, diamond, and compound semiconductors – Enhanced slicing performance with minimal chipping
Fully Automated Handling – Supports 4" / 6" / 8" wafers (option for 12")
Key Benefits – Reduced wafer slicing time – Superior cut quality with minimal surface damage – High throughput with automated handling
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